## 1. Gas Type
Clean dry non‑corrosive gas (Air, N₂, O₂, CO₂, He, H₂, CH₄, Ar)
## 2. Flow Range (N₂ equivalent)
0~20‑500 sccm / 0~1‑20 slm, custom ranges available
## 3. Core Performance
- Accuracy: ±0.3% F.S. (≤30% F.S.)；±1.0% S.P. (>30% F.S.)
- Turn‑down ratio: 100:1
- Response time: ≤0.5 s
- Repeatability: ≤±0.2% F.S.
- Max pressure: 9.8 bar
## 4. Power
DC24V, ≤4.0 W
## 5. Control & Communication
Analog: 0‑5 V / 4‑20 mA
Digital: RS485/RS232, Modbus‑RTU
Connector: D‑SUB9 / RJ45
## 6. Mechanical
- Fitting: 1/4” Compression / 1/4” VCR
- Wetted material: 316L SS, FKM
- Weight: 0.95 kg
## 7. Operating Condition
0~50 °C, 10‑90%RH; Working pressure: 0.5‑6 bar
